1.

Conference Proceedings
Conference Proceedings
1. Frequency-selective silicon vibration sensor with direct electrostatic stiffness modulation
Scheibner, D. ; Wibbeler, J. ; Mehner, J. ; Braemer, B. ; Gessner, T. ; Doetzel, W.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.325-332,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
2.

Conference Proceedings
Conference Proceedings
2. Application of micromirror arrays for Hadamard transform optics
Hanf, M. ; Kurth, S. ; Billep, D. ; Hahn, R. ; Faust, W. ; Heinz, S. ; Doetzel, W. ; Gessner, T.
Pub. info.: Microwave and Optical Technology 2003.  pp.128-131,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5445
3.

Conference Proceedings
Conference Proceedings
3. An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S. ; Hiller, K. ; Neumann, N. ; Heinze, M. ; Doetzel, W. ; Gessner, T.
Pub. info.: Microwave and Optical Technology 2003.  pp.95-100,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5445
4.

Conference Proceedings
Conference Proceedings
4. Tunable Fabry-Perot interferometer for 3- to 4.5-μm wavelength with bulk micromachined reflector carrier
Kurth, S. ; Hiller, K. ; Neumann, N. ; Heinze, M. ; Doetzel, W. ; Gessner, T.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.215-226,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983