Yang, B. ; Gao, J. ; Wang, J. ; Ma, L. ; Wu, W. ; Wang, W. ; Xie, J.
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Infrared components and their applications : 8-11 November 2004, Beijing, China. pp.163-169, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Gao, J. ; Picciotto, C. ; Wu, W. ; Park, I. ; Tong, W. M.
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Metrology, Inspection, and Process Control for Microlithography XX. pp.615223-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering