1.

Conference Proceedings
Conference Proceedings
1. Applications of ICP in optoelectronic device fabrication
Gan, Y. ; Zhang, J. ; Jiang, S. ; Huang, X. ; Zhou, N. ; Deng, L.
Pub. info.: Semiconductor and Organic Optoelectronic Materials and Devices.  pp.152-160,  2000.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5624
2.

Conference Proceedings
Conference Proceedings
2. Angled stripe InGaAsP/InP SLED fabricated by low-damage inductively coupled plasma dry etching
Zhang, J. ; Huang, X.-D. ; Chang, J. ; Liu, Y.-J. ; Gan, Y. ; Li, L.S. ; Wang, D.-L. ; Liu, T. ; Jiang, S. ; Deng, L.
Pub. info.: Materials, Active Devices, and Optical Amplifiers.  pp.473-476,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5280