Search records | 東京工業大学附属図書館文献データベース

Sort order

2 results

Conference Proceedings

1. Selectively esterified novolac resins:a study of resist properties as a function of novolac molecular weight and composition

Jeffries,A.T.III ; Brzozowy,D.J. ; Beauchemin,B.T. ; Naiini,A.A. ; Fitzgerald,E.A. ; Gallagher-Wetmore,P.M.

Pub. info.:	Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California. pp.469-480, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2724

Conference Proceedings

2. Novel combination of photoactive species:photoresists formed from selectively esterified novolacs and polyfunctional photoactive compounds

III,A.T.Jeffries ; Brzozowy,D.J. ; Naiini,A.A. ; Gallagher-Wetmore,P.M.

Pub. info.:	Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California. pp.746-756, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3049