1.

Conference Proceedings
Conference Proceedings
1. Correlation of Local Strain in a TEM Sample and in the Bulk for a Recessed SiGe CMOS Structure
W. Zhao ; G. Duscher ; M. Zikry ; S. Chopra ; M. C. Öztürk ; G. Rozgonyi
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment.  pp.23-30,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(1)
2.

Conference Proceedings
Conference Proceedings
2. Local Strain Measurement on Strained Si/SiGe Heterostructures Using Convergent Beam Electron Diffraction Analysis
W. Zhao ; G. Duscher ; G. Rozgonyi
Pub. info.: Silicon materials science and technology X.  pp.549-558,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(2)
3.

Conference Proceedings
Conference Proceedings
3. Electrical, Structural, and Chemical Analysis of Defects in Epitaxial SiGe Based Heterostructures
K. R. Bray ; W. Zhao ; L. Kordas ; R. Wise ; McD. Robinson ; G. Rozgonyi
Pub. info.: Interfaces in electronic materials : proceedings of the international symposium.  pp.23-35,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-31