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Conference Proceedings

1. Study on measuring vibration displacement by shear interference based on sinusoidal phase modulation

G. He ; F. Tang ; L. Song ; H. Jiang

Pub. info.:	4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2 pp.72834B-1-72834B-5, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7283

Conference Proceedings

2. Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy

H. Jiang ; G. He

Pub. info.:	4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 1 pp.72831O-1-72831O-6, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7283

Conference Proceedings

3. Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

G. He ; H. Jiang ; R. Liao

Pub. info.:	4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 1 pp.72831N-1-72831N-6, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7283