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Nanoengineering : fabrication, properties, optics, and devices III : 15-17 August, 2006, San Diego, California, USA. pp.63270M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Metrology, Inspection, and Process Control for Microlithography XVIII. pp.363-373, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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