1.

Conference Proceedings
Conference Proceedings
1. New design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings
Gonda, S. ; Zhou, H. ; Fu, J. ; Silver, R.M.
Pub. info.: Nanostructure Science, Metrology, and Technology.  pp.125-131,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4608
2.

Conference Proceedings
Conference Proceedings
2. Effects of etching time and wafer miscut on the morphology of etched Si(111) surfaces
Zhou, H. ; Fu, J. ; Gonda, S. ; Silver, R.M.
Pub. info.: Nanostructure Science, Metrology, and Technology.  pp.168-175,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4608