1.
Conference Proceedings
Fritze,M. ; Wyatt,P.W. ; Astolfi,D.K. ; Davis,P. ; Curtis,A.V. ; Preble,D.M. ; Cann,S.G. ; Denault,S. ; Chan,D. ; Shaw,J.C. ; Sullivan,N.T. ; Brandom,R. ; Mastovich,M.E.
Pub. info.:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA . Part2 pp.1179-1192, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
2.
Conference Proceedings
Chan,D. ; Novak,J.W. ; Fritze,M.
Pub. info.:
20th Annual BACUS Symposium on Photomask Technology . pp.911-920, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
3.
Conference Proceedings
Rhyins,P. ; Fritze,M. ; Chan,D. ; Carney,C. ; Blachowicz,B.A. ; Vieira,M. ; Mack,C.A.
Pub. info.:
21st Annual BACUS Symposium on Photomask Technology . 4562 pp.486-495, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562