1.

Conference Proceedings
Conference Proceedings
1. Extending optical lithography with immersion
Streefkerk, B. ; Baselmans, J. ; Gehoel-van Ansem, W. ; Mulkens, J. ; Hoogendam, C. ; Hoogendorp, M. ; Flagello, D.G. ; Sewell, H. ; Graupner, P.
Pub. info.: Optical Microlithography XVII.  pp.285-305,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
2.

Conference Proceedings
Conference Proceedings
2. Optical lithography in the sub-50-nm regime
Flagello, D.G. ; Arnold, B. ; Hansen, S. ; Dusa, M. ; Socha, R.J. ; Mulkens, J. ; Garreis, R.
Pub. info.: Optical Microlithography XVII.  pp.21-33,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377