1.
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Conference Proceedings
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Wang, C.A. ; Zhang, G. ; DeMoor, S. ; Tan, C. ; Ilzhoefer, J. ; Atkinson, C. ; Wickman, C. ; Hansen, S. ; Geh, B. ; Flagello, D.G. ; Boehm, M.
Pub. info.: |
Optical Microlithography XVII. pp.581-590, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
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2.
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Conference Proceedings
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Flagello, D.G. ; Arnold, B. ; Hansen, S. ; Dusa, M. ; Socha, R.J. ; Mulkens, J. ; Garreis, R.
Pub. info.: |
Optical Microlithography XVII. pp.21-33, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|