1.

Conference Proceedings
Conference Proceedings
1. Optimizing and enhancing optical systems to meet the low k1 challenge
Flagello, D.G. ; Socha, R.J. ; Shi, X. ; Schoot, J.B. ; Baselmans, J. ; Kerkhof, M.A. ; Boeij, W. ; Engelen, A. ; Carpaij, R. ; Noordman, O. ; Moers, M.H.P. ; Mulder, M. ; Finders, J. ; Greevenbroek, H. ; Schriever, M. ; Maul, M. ; Haidner, H. ; Goeppert, M. ; Wegmann, U. ; Graeupner, P.
Pub. info.: Optical Microlithography XVI.  Part One  pp.139-150,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Extending optical lithography with immersion
Streefkerk, B. ; Baselmans, J. ; Gehoel-van Ansem, W. ; Mulkens, J. ; Hoogendam, C. ; Hoogendorp, M. ; Flagello, D.G. ; Sewell, H. ; Graupner, P.
Pub. info.: Optical Microlithography XVII.  pp.285-305,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377