1.

Conference Proceedings

Conference Proceedings
Parala, H. ; Devi, A. ; Birkner, A. ; Fischer, R.A.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.429-436,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Conference Proceedings

Conference Proceedings
Wohlforr, A. ; Devi, A. ; Rogge, W. ; Fischer, R.A. ; Schaefer, J. ; Wolfrum, J. ; Allendorf, M.D.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.697-706,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
3.

Conference Proceedings

Conference Proceedings
Khanderi, J. ; Wohifart, A. ; Parala, H. ; Devi, A. ; Fischer, R.A.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.1098-1103,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8