1.

Conference Proceedings

Conference Proceedings
Paralo, H. ; Hipler, A.Devi.F. ; Birkner, A. ; Fischer, R.A.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.356-364,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Conference Proceedings

Conference Proceedings
Parala, H. ; Devi, A. ; Birkner, A. ; Fischer, R.A.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.429-436,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13