Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK. pp.266-278, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Schoot,J.van ; Finders,J. ; Schenau,K.van Ingen ; Klaassen,M. ; Buijk,C.
Pub. info.:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.250-260, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.192-205, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.56-66, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1140-1155, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Finders,J. ; Eurlings,M. ; Schenau,K.Van Ingen ; Dusa,M.V. ; Jenkins,P.
Pub. info.:
Microlithographic Techniques in Integrated Circuit Fabrication II. pp.1-15, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering