Hoeffler, A. ; Feudel, T. ; Strecker, N. ; Fichtner, W.
Pub. info.:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.75-84, 1996. Pennington, NJ. Electrochemical Society
Hegarty, C. ; Feudel, T. ; Hitschfeld, N. ; Ryter, R. ; Streeker, N. ; Westermann, M. ; Fichtner, W.
Pub. info.:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.565-575, 1993. Pennington, NJ. Electrochemical Society