Wang, C. ; Li, H. ; Fang, J. ; Zhang, D. ; Chang, S.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.428-433, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation. pp.635856-635856, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering