1.

Conference Proceedings
Conference Proceedings
1. On Recent Progress Applying Quantum Cascade Laser-Absorption Spectroscopy for Plasma Process Monitoring
J. Roepcke ; S. Glitsch ; F. Hempel ; M. Huebner ; N. Lang ; U. Macherius ; H. Pridoehl ; S. Saβ ; G.D Stancu ; K.-D. Weltmann ; S. Welzel ; H. Zimmermann
Pub. info.: 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C..  pp.733-737,  2006.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 49
2.

Conference Proceedings
Conference Proceedings
2. On the Application of Quantum Cascade Laser-Absorption Spectroscopy for Plasma Process Monitoring
J. Röpcke ; S. Glitsch ; F. Hempel ; S. Saβ ; K.-D. Schulz ; K.-D. Weltmann ; H. Zimmermann
Pub. info.: 48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado.  pp.27-29,  2005.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 48