1.

Conference Proceedings
Conference Proceedings
1. RAMAN SPECTROSCOPY ANALYSIS OF NITROGEN ION IMPLANTATION IN SILICON AND CORRELATION WITH TRANSMISSION ELECTRON MICROSCOPY
Perez-Rodriguez, A. ; Romano-Rodriguez, A. ; Morante, J.R. ; Esteve, J. ; Montserrat, J.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.177-182,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. Synthesis Of Biocompatible Surfaces By Different Plasma Polymerization Techniques
Garreta, E. ; Fernandez, T. ; Borros, S. ; Esteve, J. ; Colominas, C. ; Kempf, L.
Pub. info.: Biological and biomimetie materials - properties to function : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.173-178,  2002.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 724
3.

Conference Proceedings
Conference Proceedings
3. Large-signal model of a resonating cantilever-based transducer for system level electrical simulation
Verd, J. ; Teva, J. ; Abadal, G. ; Perez-Murano, F. ; Esteve, J. ; Barniol, N.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.98-106,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
4.

Conference Proceedings
Conference Proceedings
4. Integrable silicon microsystem for three-dimensional flow focusing
Luque, A. ; Quero, J. M. ; Ganan-Calvo, A. M. ; Esteve, J. ; Gonsalve, S.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.407-415,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
5.

Conference Proceedings
Conference Proceedings
5. Stress in Hydrogenated Microcrystalline Silicon Thin Films
Bertomeu, J. ; Esteve, J. ; Martinez, E. ; Peiro, D. ; reu, J. ; Voz, C.
Pub. info.: Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A..  pp.537-542,  1999.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 557
6.

Conference Proceedings
Conference Proceedings
6. CMOS degradation effects due to electron beam lithography in smart NEMS fabrication
Campabadal, F. ; Ghatnekar-Nilsson, S. ; Rius, G. ; Fleta, C. ; Raff, J. M. ; Figueras, E. ; Esteve, J.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.667-674,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
7.

Conference Proceedings
Conference Proceedings
7. Effects of Substrate Bias on the Nucleation of Diamond Films Studied by Atomic Force Microscopy
Sanchez, G. ; Polo, M. C. ; Wang, W. L. ; Esteve, J.
Pub. info.: Diamond for electronic applications.  pp.187-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 416
8.

Conference Proceedings
Conference Proceedings
8. SiCOI structures. Technology and characterization
Serre, C. ; Perez-Rodriguez, A. ; Romano-Rodriguez, A. ; Morante, J.R. ; Esteve, J. ; Acero, M.C. ; Koegler, R. ; Skorupa, W.
Pub. info.: Progress in SOI structures and devices operating at extreme conditions.  pp.17-30,  2002.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 58
9.

Conference Proceedings
Conference Proceedings
9. Epitaxial Growth of β-SiC on Ion-Beam Synthesized β-SiC: Structural Characterization
Romano-Rodriguez, A. ; Perez-Rodriguez, A. ; Serre, C. ; Morante, J. R. ; Esteve, J. ; Acero, M. C. ; Kogler, R. ; Skorupa, W. ; Ostling, M. ; Nordell, N. ; Karlsson, S. ; Landuyt, J. Van
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.309-312,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(1)
10.

Conference Proceedings
Conference Proceedings
10. Structural and Electrical Characterization of Ion Beam Synthesized and n-Doped SiC Layers
Serre, C. ; Panknin, D. ; Perez-Rodriguez, A. ; Romano-Rodriguez, A. ; Morante, J.R. ; Koegler, R. ; Skorupa, W. ; Esteve, J. ; Acero, M.C.
Pub. info.: Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000.  pp.591-594,  2001.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 353-356
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Conference Proceedings
Conference Proceedings
11. MICROSTRUCTURE OF BURIED THIN ETCH STOP FILMS FORMED BY NITROGEN IMPLANTATION INTO SILICON
Romano-Rodriguez, A. ; El-Hassani, A. ; Perez-Rodriguez, A. ; Samitier, J. ; Morante, J. R. ; Esteve, J. ; Acero, M. C.
Pub. info.: Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A..  pp.361-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 308
12.

Conference Proceedings
Conference Proceedings
12. Synthesis of Thin Membranes in Si Technology by Carbon Ion Implantation
Serre, C. ; Perez-Rodriguez, A. ; Calvo-Barrio, L. ; Romano-Rodriguez, A. ; Morante, J. R. ; Esteve, J. ; Acero, M. C. ; Skorupa, W. ; Kogler, R.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.727-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
13.

Conference Proceedings
Conference Proceedings
13. Band-pass transimpedance read-out circuit for UHF MEMS resonator applications
Campanella, H. ; Uranga, A. ; Davis, Z. ; Esteve, J. ; Teres, L. ; Barniol, N.
Pub. info.: VLSI Circuits and Systems II.  pp.300-309,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5837
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Conference Proceedings
Conference Proceedings
14. SOI-silicon as structural layer for NEMS applications
Villarroya, M. ; Figueras, E. ; Perez-Murano, F. ; Campabadal, F. ; Esteve, J. ; Barniol, N.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.1-11,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
15.

Conference Proceedings
Conference Proceedings
15. Measurements of deformations in osseous structures and implants by digital speckle interferometry (DSPI) [6341-95]
Salvador, R. ; Gonzalez-Pena, R. ; Cibrian, R. ; Buendia, M. ; Minguez, F. ; Laguia, M. ; Molina, T. ; Marti, L. ; Esteve, J. ; Caballero, J. ; Mico, V. ; Sanjuan, E.
Pub. info.: Speckle06: Speckles, From Grains to Flowers.  pp.63412N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6341