1.

Conference Proceedings
Conference Proceedings
1. Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures
Dyck,C.W. ; Smith,J.H. ; Miller,S.L. ; Russick,E.M. ; Adkins,C.L.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.225-235,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
2.

Conference Proceedings
Conference Proceedings
2. SPICE Level 3 and BSIM3v3.1 characterization of monolithic integrated CMOS-MEMS devices
Staple,B.D. ; Watts,H.A. ; Dyck,C.W. ; Griego,A.P. ; Hewlett,F.W. ; Smith,J.H.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.410-420,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512