salvador, D. De ; Mattoni, A. ; Napolitani, E. ; Drigo, A.V. ; Mirabella, S. ; Priolo, F.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.225-230, 2002. Warrendale, Pa.. Materials Research Society
Salvador, D.De ; Bisognin, G. ; Napolitani, E. ; Aldegheri, L. ; Drigo, A.V. ; Carnera, A. ; Mirabella, S. ; Bruno, E. ; Impellizzeri, G. ; Priolo, F.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.301-306, 2004. Warrendale, Pa.. Materials Research Society