Bentini, G.G. ; Nipoti, R. ; Berti, M. ; Drigo, A.V. ; Cohen, C.
Pub. info.:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.443-448, 1982. New York. North Holland
Salvador, D. De ; Napolitani, E. ; Coati, A. ; Berti, M. ; Drigo, A.V. ; Carroll, M. ; Sturm, J.C. ; Stangl, J. ; Bauer, G. ; Lazzarini, L.
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society