1.

Conference Proceedings
Conference Proceedings
1. Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films
Chen, M. ; Rengarajan, S. ; Hey, P. ; Dordi, Y. ; Zhang, H. ; Hashim, I. ; Ding, P. ; Chin, B.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.413-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films
Chen, M. ; Chin, B. ; Ding, P. ; Dordi, Y. ; Hashim, I. ; Hey, P. ; Rengarajan, S. ; Zhang, H.
Pub. info.: Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.249-256,  1999.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 562