1.
Conference Proceedings
De Meyer, K. ; Collaert, N. ; Kubicek, S. ; Kottontharayil, A. ; van Meer, H. ; Verheyen, P.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.291-305, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-6
2.
Conference Proceedings
Eneman, G. ; Simoen, E. ; Delhougne, R. ; Verheyen, P. ; Simons, V. ; Loo, R. ; Caymax, M. ; De Meyer, K. ; Vandervorst, W. ; Claeys, C.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.338-348, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06
3.
Conference Proceedings
Simoen, E. ; Eneman, G. ; Verheyen, P. ; Delhougne, R. ; Rooyackers, R. ; Loo, R. ; Vandervorst, W. ; De Meyer, K. ; Claeys, C.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.349-359, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06
4.
Conference Proceedings
Eneman, G. ; Simoen, E. ; Delhougne, R. ; Verheyen, P. ; Ries, M. ; Loo, R. ; Caymax, M. ; Vandervorst, W. ; De Meyer, K.
Pub. info.:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. . pp.119-124, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
864