1.

Conference Proceedings
Conference Proceedings
1. Langmuir Probe and Optical Emission Spectroscopy Study of an Inductively Coupled Plasma Source
Daltrini, A. M. ; Monteiro, M. J. R. ; Kostryukov, A. ; Moshkalyov, S. A. ; Machida, M. ; Besseler, E.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.245-253,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
2.

Conference Proceedings
Conference Proceedings
2. Inductively Coupled Plasma Test Reactor Development and Plasma Measurements
Monteiro, M. J. R. ; Kostryukov, A. ; Daltrini, A. M. ; Moshkalyov, S. A. ; Machida, M. ; Besseler, E.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.226-234,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08