1.

Conference Proceedings
Conference Proceedings
1. Innovative Low damage Silicon Nitride Passivation of 100 nm In0.45AlAs/In0.4GaAs Metamorphic HEMTs with Remote ICPCVD
D. Kim ; J. Maeng ; S. Kim ; J. Her ; S. Yeon ; H. Kim ; K. Seo
Pub. info.: Silicon nitride, silicon dioxide, and emerging dielectrics 9.  pp.577-590,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(3)
2.

Conference Proceedings
Conference Proceedings
2. Effect of deprotection activation energy on lithographic performance of EUVL resist
S. Kim ; G. Yu ; J. Lee ; H. Kim ; D. Kim ; Y. Kang ; J. Kim
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of litho printability of DRAM contact hole patterns with various programmed defects
K. Seo ; S. Lee ; H. Kim ; D. Hwang ; S. Kim ; G. Jeong ; O. Han ; C. Chen ; D. Yee ; E. Kim ; K. Park ; N. Kim ; S. Choi ; D. Kim ; S. Lohokare
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
4.

Conference Proceedings
Conference Proceedings
4. Demonstration of all optical logic gates by single/differential typed vertical cavity laser with depleted optical thyristor
W. Choi ; D. Kim ; Y. Moon ; H. Kim ; T. K. Chung ; Y. Choi ; K. D. Choquette ; S. Lee ; D. Woo
Pub. info.: Vertical-cavity surface-emitting lasers XI : 24-25 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6484
5.

Conference Proceedings
Conference Proceedings
5. Study of flapping actuator modules using IPMC
H. Kim ; D. Kim ; J. Han
Pub. info.: Electroactive polymer actuators and devices (EAPAD) 2007 : 19-22 March 2007, San Diego, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6524
6.

Conference Proceedings
Conference Proceedings
6. Measurement-based objective metric for printer resolution
J. Hasegawa ; T. Hwang ; H. Kim ; D. Kim ; M. Choi
Pub. info.: Image quality and system performance IV : 30 January-1 February 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6494