Jungk, J. M. ; Crozier, B. T. ; Bandyopadhyay, A. ; Moody, N. R. ; Bahr, D. F.
Pub. info.:
Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.225-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Crozier, B. T. ; Boer, M. P. de ; Redmond, J. M. ; Bahr, D. F. ; Michalske, T. A.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.129-, 2000. Warrendale, Pa.. MRS-Materials Research Society