1.

Conference Proceedings
Conference Proceedings
1. COMPOSITION ANALYSIS OF RF PLASMA-DEPOSITED AMORPHOUS SILICON OXYNITRIDE THIN FILMS BY SPECTROSCOPIC PHASE-MODULATED ELLIPSOMETRY
Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Costa, J. ; Bertran, E.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.351-356,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. PRODUCTION OF SILICON POWDER BY SQUARE-WAVE MODULATED RF SILANE PLASMA
Costa, J. ; Sardin, G. ; Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Bertran, E.
Pub. info.: Nanophase and nanocomposite materials : symposium held December 1-3, 1992, Boston, Massachusetts, U.S.A..  pp.155-160,  1993.  Pittsburg, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 286
3.

Conference Proceedings
Conference Proceedings
3. MICROSTRUCTURAL AND VIBRATIONAL CHARACTERIZATION OF THE HYDROGENATED AMORPHOUS SILICON POWDERS
Costa, J. ; Sardin, G. ; Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Bertran, E.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.1031-1036,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
4.

Conference Proceedings
Conference Proceedings
4. Real Time Ellipsometric Study of Boron Nitride Thin Film Growth
Bertran, E. ; Canillas, A. ; Campmany, J. ; Kasmi, M. El ; Pascual, E. ; Costa, J. ; Andujar, J. L.
Pub. info.: Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.307-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 410