1.

Conference Proceedings
Conference Proceedings
1. Imaging properties of a leading-edge DUV laser generated photomask
Jackson, C.A. ; Buck, P.D. ; Cohen, S. ; Garg, V. ; Hickethier, J. ; Howard, C.H. ; Kiefer, R.M. ; Lamantia, M.J. ; Manfredo, J.C. ; Tsou, J.G.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.67-75,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
2.

Conference Proceedings
Conference Proceedings
2. DUV laser lithography for photomask fabrication
Jackson, C.A. ; Buck, P. ; Cohen, S. ; Garg, V. ; Howard, C. ; Kiefer, R. ; Manfredo, J. ; Tsou, J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.30-41,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
3.

Conference Proceedings
Conference Proceedings
3. DUV laser lithography for photomask fabrication
Jackson, C.A. ; Buck, P. ; Cohen, S. ; Garg, V. ; Howard, C. ; Kiefer, R.M. ; Manfredo, J. ; Tsou, J.
Pub. info.: Optical Microlithography XVII.  pp.1005-1016,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377