Kiefer, R. ; Jackson, C. ; Garg, V. ; Mellenthin, D. ; Manfredo, J. ; Buck, P. ; Cohen, S. ; Morgante, C. ; Allen, P. C. ; White, M.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.315-326, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Jackson, C. ; Kiefer, R. ; Buck, P. ; Mellenthin, D. ; Manfredo, J. ; Garg, V. ; Hickethier, J. ; Cohen, S. ; Morgante, C. ; Allen, P. C. ; Christenson, E. ; White, M.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XII. pp.387-397, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering