1.

Conference Proceedings
Conference Proceedings
1. In Situ Analysis of the Formation of Thin TiSi2 (<50 nm) Contacts in Submicron CMOS Structures During Rapid Thermal Annealing
Clevenger, L. A. ; Cabral, C., Jr ; Roy, R. A. ; Lavoie, C. ; Viswanathan, R. ; Saenger, K. L. ; Jordan-Sweet, J. ; Morales, G. ; Ludwig, K. L., Jr ; Stephenson, G. B.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.257-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
2.

Conference Proceedings
Conference Proceedings
2. Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide
Lavoie, C. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E. ; Jordan-Sweet, J. ; Saenger, K. L. ; Doany, F.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.163-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406
3.

Conference Proceedings
Conference Proceedings
3. Surface Roughening During Titanium Silicide Formation: A Comparison Between Si(100) and Poly-Si Substrates
Lavoie, C. ; Martel, R. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E.
Pub. info.: Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A..  pp.389-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 440
4.

Conference Proceedings
Conference Proceedings
4. In Situ TEM Analysis of TiSi2 C49-C54 Transformations During Annealing
Gignac, L. M. ; Svilan, V. ; Clevenger, L. A. ; Cabral, C., Jr. ; Lavoie, C.
Pub. info.: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.255-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 441
5.

Conference Proceedings
Conference Proceedings
5. Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures
Svilan, V. ; Rodbell, K. P. ; Clevenger, L. A. ; Cabral, C., Jr. ; Roy, R. A. ; Lavoie, C. ; Jordan-Sweet, J. ; Harper, J. M. E.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.53-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
6.

Conference Proceedings
Conference Proceedings
6. Phase Transformation and Microstructural Properties in Sputtered Versus CVD WSix Films
Domenicucci, A. ; Dehm, C. ; Loh, S. ; Clevenger, L. A. ; Dziobkowski, C. ; Cabral, C. ; Lavoie, C. ; Jorden-Sweet, J.
Pub. info.: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.3-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 441