Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

14 results

Conference Proceedings

1. KINETICS OF INTERMETALLIC FORMATION IN FREE STANDING Cu/Mg MULTILAYER THIN FILMS

Arcot, B. ; Clevenger, L. A. ; Murarkar, S. P. ; Harper, J. M. E. ; Cabral Jr., C.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.947-952, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. EFFECT OF DEPOSITION CONDITIONS ON INTRINSIC STRESS, PHASE TRANSFORMATION AND STRESS RELAXATION IN TANTALUM THIN FILMS

Mustcheller, A. ; Clevenger, L. A. ; Harper, J. M. E. ; Cabral Jr., C. ; Barmak, K.

Pub. info.:	Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.. pp.51-56, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	239

Conference Proceedings

3. Phase Formation in Cu(Sn) Alloy Thin Films

Clevenger, L. A. ; Arcot, B. ; Ziegler, W. ; Colgan, E. G. ; Hong, Q. Z. ; d'Heurle, F. M. ; Cabral, C., Jr. ; Gallo, T. A. ; Harper, J. M. E.

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.133-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

Conference Proceedings

4. Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide

Lavoie, C. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E. ; Jordan-Sweet, J. ; Saenger, K. L. ; Doany, F.

Pub. info.:	Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.163-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	406

Conference Proceedings

5. In Situ X-ray Diffraction Analysis of TiSi2 Phase Formation From a Titanium-Molybdenum Bilayer

Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E. ; Roy, R. A. ; Saenger, K. L. ; Miles, G. L. ; Mann, R. W.

Pub. info.:	Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.295-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	441

Conference Proceedings

6. Surface Roughening During Titanium Silicide Formation: A Comparison Between Si(100) and Poly-Si Substrates

Lavoie, C. ; Martel, R. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E.

Pub. info.:	Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A.. pp.389-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	440

Conference Proceedings

7. Effect of Boron Doping on the C49 to C54 Phase Transformation in Ti/Si(100) Bilayers

Quintero, A. ; Libera, M. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E.

Pub. info.:	Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.303-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	441

Conference Proceedings

8. STRESS EVOLUTION DURING THE FORMATION AND TRANSFORMATION OF TITANIUM SILICIDE

Svilan, V. ; Harper, J. M. E. ; Cabral, C., Jr. ; Clevenger, L. A.

Pub. info.:	Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.167-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	356

Conference Proceedings

9. In-Situ Measurements During Rapid Thermal Annealing for Process Characterization

Colgan, E. G. ; Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E.

Pub. info.:	Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.321-, 1995. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	389

10.

Conference Proceedings

10. SILICIDE FORMATION IN Ti-Si AND Co-Si REACTIONS

Clevenger, L. A. ; Hong, Q. Z. ; Mann, R. ; Harper, J. M. E. ; Barmak, K. ; Cabral, C., Jr. ; Nobili, C. ; Ottaviani, G.

Pub. info.:	Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A.. pp.253-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	311

14 results

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

Filtering by: