1.

Conference Proceedings

Conference Proceedings
Nam,C. ; Choi,W. ; Chun,K.
Pub. info.: Micromachining and Microfabrication.  pp.10-17,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230
2.

Conference Proceedings

Conference Proceedings
Seok,S. ; Nam,C. ; Chun,K.
Pub. info.: Micromachining and Microfabrication.  pp.26-33,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230