1.

Conference Proceedings
Conference Proceedings
1. STABILITY OF HEAVILY DOPED Si FORMED BY As+ IMPLANTATION AND RAPID THERMAL ANNEALING
Numan, M.Z. ; Lu, Z.H. ; Chu, W.K. ; Fathy, D. ; Wortman, J.J.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.31-36,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. HCl OXIDATION OF HIGH DOSE ARSENIC IMPLANTED SILICON
Choi, Seong Soo ; Numan, M.Z. ; Finstad, T.G. ; Chu, W.K. ; Fathy, D.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.567-572,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54