1.

Conference Proceedings
Conference Proceedings
1. PROPERTIES OF AMORPHOUS SILICON FILMS DEPOSITED AT RATES HIGHER THAN 1 μm/MIN
Chu, T.L. ; Chu, Shirley S. ; Ang, S.T. ; Duong, A. ; Han, Y.X.
Pub. info.: Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.49-54,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 70
2.

Conference Proceedings
Conference Proceedings
2. HYDROGENATED AMORPHOUS SILICON FILMS BY THE PYROLYSIS OF DISILANE
Chu, T.L. ; Chu, S.S. ; Ang, S.T. ; Lo, D.H. ; Duong, A. ; Hwaung, C.G. ; Book, L.
Pub. info.: Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A..  pp.21-26,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 49