1.

Conference Proceedings
Conference Proceedings
1. Alignment system for ArF excimer-laser-based step-and-scan system
Kim,D.H. ; Kim,J.S. ; Sohn,Y.J. ; Kwon,J.H. ; Lee,K.H. ; Choi,S.-S. ; Chung,H.B. ; Yoo,H.J. ; Kim,B.W.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.958-970,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Design of illumination system for ArF excimer laser step-and-scanner
Lee,K.H. ; Kim,D.H. ; Kim,J.S. ; Choi,S.-S. ; Chung,H.B. ; Yoo,H.J. ; Kim,B.W.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.997-1004,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334