1.

Conference Proceedings
Conference Proceedings
1. Lg=0.25-ｦﾌm CMOS devices with N+polycide gate for 3.3-V application
Choi,J.Y. ; Ma,Z.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.164-168,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875
2.

Conference Proceedings
Conference Proceedings
2. Scaling considerations of interpoly oxide-nitride-oxide dielectric for high-density DRAM applications
Ma,Z. ; Choi,J.Y. ; Lien,C.-D.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.201-206,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875