1.

Conference Proceedings
Conference Proceedings
1. Load balancing using DP management server for commercial MDP software [6349-146]
Kim, J.-W. ; Ki, W.-T. ; Jang, S.-H. ; Choi, J.-H. ; Choi, S.-W. ; Han, W.-S.
Pub. info.: Photomask Technology 2006.  pp.63493X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings
Conference Proceedings
2. Analysis of dose modulation method for fogging effect correction at 50-KeV e-beam system
Jang, S.-H. ; Yang, S.-H. ; Ahn, B.-S. ; Ki, W.-T. ; Choi, J.-H. ; Choi, S.-W. ; Han, W.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.669-674,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446