1.

Conference Proceedings
Conference Proceedings
1. Vacuum delay effect of CAR in mask fabrication
Kim,C.-H. ; Jeon,C.-U. ; Han,S.-J. ; Cho,W.-I. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.285-293,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Mask considerations for manufacturing assist features
Choi,J.-H. ; Cho,W.-I. ; Kim,B.-S. ; Yang,S.-H. ; Moon,S.-Y. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: Optical Microlithography XIV.  4346  pp.131-140,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346