1.

Conference Proceedings
Conference Proceedings
1. Measurement of lens aberration by using in-situ interferometer and classification of lens for correct application
Seong,N. ; Yeo,G. ; Cho,H. ; Moon,J.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.30-39,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Interfield sampling method dependency of overlay and global alignment
Hong,J. ; Lee,J. ; Cho,H. ; Moon,J. ; Lee,S.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.856-862,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
3.

Conference Proceedings
Conference Proceedings
3. Patterning 220-nm pitch DRAM patterns by using double mask exposure
Nam,D. ; Seong,N. ; Cho,H. ; Moon,J. ; Lee,S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.283-292,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
4.

Conference Proceedings
Conference Proceedings
4. Application of phase-edge PSM for narrow logic gate
Kim,B. ; Park,C. ; Ryoo,M. ; Lee,K. ; Cho,H. ; Moon,J.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.943-952,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
5.

Conference Proceedings
Conference Proceedings
5. Fabrication of membrane mask for next-generation lithography
Kim,D. ; Lera,J.D. ; Cho,H. ; Moon,J.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.255-260,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
6.

Conference Proceedings
Conference Proceedings
6. Pattern asymmetry correction using assist patterns
Ryoo,M. ; Nam,D. ; Cho,H. ; Moon,J. ; Lee,S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.307-314,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
7.

Conference Proceedings
Conference Proceedings
7. Measurement of 6-DOF displacement of rigid bodies through splitting a laser beam: experimental investigation
Park,W.S. ; Cho,H. ; Byun,Y.K. ; Park,N.Y.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.80-91,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
8.

Conference Proceedings
Conference Proceedings
8. Enhancement of placement accuracy for SMD via development of a new illumination system
Ko,K.W. ; Kim,J.W. ; Cho,H. ; Jin,K.S. ; Koh,K.I.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.51-61,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
9.

Conference Proceedings
Conference Proceedings
9. Sensor-based navigation of air duct inspection mobile robots
Koh,K.C. ; Choi,H.J. ; Kim,J.S. ; Ko,K.W. ; Cho,H.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.202-211,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
10.

Conference Proceedings
Conference Proceedings
10. Three-dimensional volume reconstruction of an object from x-ray images
Roh,Y.J. ; Kim,B.M. ; Cho,H. ; Kim,H.C.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.181-191,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
11.

Conference Proceedings
Conference Proceedings
11. Adaptive tracking of weld joints using active contour model in arc-welding processes
Kim,J.S. ; Koh,K.C. ; Cho,H.
Pub. info.: Optomechatronic systems : 5-6 November 2000, Boston, USA.  pp.29-40,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4190
12.

Technical Paper
Technical Paper
12. Practical Time-to-Go Estimation Methods for Optimal Guidance
Ryoo,C.-K. ; Tahk,M.-J. ; Cho,H.
Pub. info.: A collection of technical papers : AIAA Guidance, Navigation and Control Conference and Exhibit, Portland, Oregon 9-11 August 1999.  Pt. 2  pp.1039-1046,  1999.  Reston, VA.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Guidance Navigation and Control Conference
Ser. no.: 1999
13.

Technical Paper
Technical Paper
13. Effects of Rib Turbulator on Heat/Mass Transfer for Impingement/Effusion Cooling with Crossflow
Rhee, D. ; Nam, Y. ; Cho,H.
Pub. info.: AIAA meeting papers on disc.  2004.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 42nd
14.

Technical Paper
Technical Paper
14. Heat Transfer Coefficients on a Flat Surface Impinged by the Under-expanded Sonic Jet
Yu, M. ; Kim, B. ; Cho,H. ; Hwang, K. ; Bae,J.
Pub. info.: AIAA meeting papers on disc.  2004.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 42nd
15.

Conference Proceedings
Conference Proceedings
15. Emergence of assist feature OPC era in sub-130-nm DRAM devices
Kim,B. ; Kim,I. ; Yeo,G. ; Lee,J. ; Choi,J. ; Cho,H. ; Moon,J.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.452-459,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
16.

Conference Proceedings
Conference Proceedings
16. Lithography process design for 4-Gb DRAM of 0.31 k1 with KrF
Park,J. ; Yeo,G. ; Kim,I. ; Kim,B.-S. ; Lee,J. ; Cho,H. ; Moon,J.T.
Pub. info.: Optical Microlithography XIV.  4346  pp.205-213,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
17.

Conference Proceedings
Conference Proceedings
17. Optimal lens assignment through measured aberrations
Seong,N. ; Kang,Y.S. ; Cho,H. ; Moon,J.
Pub. info.: Optical Microlithography XIV.  4346  pp.1-7,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
18.

Conference Proceedings
Conference Proceedings
18. Carbon antireflective coating (ARC) technology for both KrF and ArF lithography
Kim,Y. ; Lee,J. ; Cho,H. ; Moon,J.T.
Pub. info.: Optical Microlithography XIV.  4346  pp.994-1002,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346