1.

Conference Proceedings
Conference Proceedings
1. Electrical defect SEM review under the various electric circumstances on SAC layer
Lee, T.Y. ; Whan, N.-K. ; Lee, B.H. ; Chin, S.-B. ; Cho, D.H. ; Choi, J.I. ; Hur, S.S. ; Ko, K.H. ; Yeo, J.-H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.859-864,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings
Conference Proceedings
2. Optical characterization of defects on patterned wafers: exploring light polarization
Lee, B.H. ; Chin, S.-B. ; Cho, D.H. ; Song, C.-L. ; Yeo, J.-H. ; Some, D. ; Reinhorn, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.849-858,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375