1.

Conference Proceedings
Conference Proceedings
1. High-bandwidth polymer modulators
Chen,D. ; Fetterman,H.R. ; Chen,A. ; Steier,W.H. ; Dalton,L.R. ; Wang,W. ; Shi,Y.
Pub. info.: Optoelectronic Integrated Circuits.  pp.314-317,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3006
2.

Conference Proceedings
Conference Proceedings
2. Impact of attenuated PSM repair for 130-nm polygate lithography process
Shi,X. ; Hsu,S. ; Socha,R.J. ; Chen,J.F. ; Cheng,A. ; Su,C. ; Cheng,J. ; Chen,A. ; Lin,H. ; Wang,D. ; Chen,D. ; Lin,A. ; Conley,W. ; Metzger,D. ; Shi,X. ; Imamura,P.H. ; Sherrill,M.J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.707-715,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344