1.

Conference Proceedings
Conference Proceedings
1. SOME PROPERTIES OF ULTRA THIN OXIDES GROWN IN AFTERGLOW OXYGEN PLASMA
Chen, P. C. ; Lin, J. Y. ; Hsu, Y. .J ; Hwang, H. L.
Pub. info.: Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A..  pp.157-160,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 268
2.

Conference Proceedings
Conference Proceedings
2. IMPROVEMENTS ON ELECTRICAL PROPERTIES OF ULTRA-THIN SILCON OXIDES GROWN BY MICROWAVE AFTERGLOW OXYGEN PLASMA
Chen, P. C. ; Lin, J. Y. ; Hwang, H. L.
Pub. info.: Microwave processing of materials IV : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.623-,  1994.  Pittsburgh,, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 347