1.

Conference Proceedings
Conference Proceedings
1. Application of simulation-based defect printability analysis at mask qualification control
Lu, J. ; Lu, A. ; Pang, L. ; Lee, D. ; Chen, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.33-40,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. Enhanced dispositioning of reticle defects for advanced masks using virtual stepper with automated defect severity scoring
Pang, L. ; Lu, A. ; Chen, J. ; Guo, E. ; Cai, L. ; Chen, J.-H.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.461-473,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256