1.

Conference Proceedings

Conference Proceedings
Chen, J. ; Robinson, H.G. ; Herner, S.B. ; Jones, K.S.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1029-1040,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings

Conference Proceedings
Meng, H.L. ; Chen, J. ; Robinson, H.G. ; Law, M.E. ; Slinkman, J.A. ; Jones, K.S.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.236-242,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6