Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.1029-1040, 1994. Pennington, NJ. Electrochemical Society
Meng, H.L. ; Chen, J. ; Robinson, H.G. ; Law, M.E. ; Slinkman, J.A. ; Jones, K.S.
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Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.236-242, 1993. Pennington, NJ. Electrochemical Society