1.
|
Conference Proceedings
|
Qiu, Y. ; Chen, B. ; Liu, M. ; Xu, Q. ; Xue, L. ; Ren, L. ; Hu, Y. ; Long, S. ; Lu, J. ; Kong, X. ; Li, L. ; Li, J. ; Tang, Y.
Pub. info.: |
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China. pp.353-364, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5645 |
|
2.
|
Conference Proceedings
|
Long, S. ; Li, Z. ; Zhao, X. ; Chen, B. ; Liu, M.
Pub. info.: |
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China. pp.255-266, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5645 |
|