1.

Conference Proceedings
Conference Proceedings
1. The application of optical resolution enhancement technology and e-beam direct writing technology in microfabrication
Qiu, Y. ; Chen, B. ; Liu, M. ; Xu, Q. ; Xue, L. ; Ren, L. ; Hu, Y. ; Long, S. ; Lu, J. ; Kong, X. ; Li, L. ; Li, J. ; Tang, Y.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.353-364,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings
Conference Proceedings
2. Method of printing 100-nm random interconnect pattern with alt-PSM
Lu, J. ; Chen, B. ; Liu, M. ; Kang, X.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.55-62,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
3.

Conference Proceedings
Conference Proceedings
3. Process study of ZEP520 positive electron-beam resist and its application in single-electron transistor
Long, S. ; Li, Z. ; Zhao, X. ; Chen, B. ; Liu, M.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.255-266,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
4.

Conference Proceedings
Conference Proceedings
4. The advanced nanofabrication technology
Liu, M. ; Xu, Q. ; Chen, B. ; Xie, C. ; Ye, T. ; Liu, X.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.275-282,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645