1.

Conference Proceedings
Conference Proceedings
1. LASER PHYSICAL AND LASER CHEMICAL VAPOR DEPOSITION OF TiN AND TiNxOx FILMS
Narayan, J. ; Biunno, N. ; Srivatsa, A.R. ; Singh, R. ; Chen, B.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.435-440,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. LASER CHEMICAL VAPOR DEPOSITION OF TiN FILMS
Chen, B. ; Biunno, N. ; Singh, R.K. ; Narayan, J.
Pub. info.: Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.287-292,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 168