1.

Conference Proceedings
Conference Proceedings
1. Process-induced damage to SRAM poly-load resistance during photoresist ashing in H2O plasma
Chang,K.-H. ; Huang,Y.-C. ; Lin,T.-H. ; Chang,C.-R.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis.  pp.276-283,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2635
2.

Conference Proceedings
Conference Proceedings
2. Particle contamination within the tungsten etch back chamber
Chu,P.-T. ; Chang,K.-H. ; Peng,T.-M. ; Chang,C.-H. ; Yen,S.-W. ; Lin,T.-H. ; Chang,C.-R.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis.  pp.66-76,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2635