1.

Conference Proceedings
Conference Proceedings
1. Achieving CDU requirement for 90-nm technology node and beyond with advanced mask making process technology
Tzu, S.-D. ; Chang, C.-H. ; Chen, W.-C. ; Kliem, K.-H. ; Hudek, P. ; Beyer, D.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.100-108,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings
Conference Proceedings
2. Novel contact hole reticle design for enhanced lithography process window in IC manufacturing
Chang, C.-H.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.32-43,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
3.

Conference Proceedings
Conference Proceedings
3. Grating arrays for high-throughput soft x-ray spectrometers
Rasmussen, A.P. ; Aquila, A. ; Bookbinder, J. ; Chang, C.-H. ; Gullikson, E.M. ; Heilmann, R.K. ; Kahn, S.M. ; Paerels, F. ; Schattenburg, M.L.
Pub. info.: Optics for EUV, X-Ray, and gamma-ray astronomy : 4-7 August 2003, San Diego, California, USA.  pp.248-259,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5168
4.

Conference Proceedings
Conference Proceedings
4. Advances in reflection grating technology for Constellation-X
Heilmann, R.K. ; Akilian, M. ; Chang, C.-H. ; Chen, C.G. ; Forest, C.R. ; Joo, C. ; Konkola, P.T. ; Montoya, J.C. ; Sun, Y. ; You, J. ; Schattenburg, M.L.
Pub. info.: Optics for EUV, X-Ray, and gamma-ray astronomy : 4-7 August 2003, San Diego, California, USA.  pp.271-282,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5168
5.

Conference Proceedings
Conference Proceedings
5. Shaping of thin grazing-incidence reflection grating substrates via magnetorheological finishing [5900-09]
Heilmann, R. K. ; Akilian, M. ; Chang, C.-H. ; Hallock, R. ; Cleaveland, E. ; Schattenburg, M. L.
Pub. info.: Optics for EUV, x-ray, and gamma-ray astronomy II : 3-4 August 2005, San Diego, California, USA.  pp.590009-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5900
6.

Conference Proceedings
Conference Proceedings
6. Off-plane grazing-incidence Constellation-X grating calibrations using polarized synchrotron radiation and PCGRATE code calculations [5900-11]
Seely, J. F. ; Goray, L. I. ; Kjornrattanawanich, B. ; Laming, J. M. ; Holland, G. E. ; Flanagan, K. A. ; Heilmann, R. K. ; Chang, C.-H. ; Schattenburg, M. L. ; Rasmussen, A. P.
Pub. info.: Optics for EUV, x-ray, and gamma-ray astronomy II : 3-4 August 2005, San Diego, California, USA.  pp.59000B-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5900
7.

Conference Proceedings
Conference Proceedings
7. 31 New Materials, Processes and Device Structures for 65nm CMOS Technology Node and Beyond
Nguyen, B.-Y. ; Them, A. ; Zhang, D. ; White, T. ; Sadaka, M. ; Triyoso, D. ; Schaeffer, J. ; Goolsby, B. ; Dhandapani, V. ; Nguyen, T. ; Vartanian, V. ; McCormick, L. ; Theodore, D. ; Zollner, S. ; Xie, Q. ; Wang, X.-D. ; Canonico, M. ; Kotte, M. ; Shi, Z. ; Mathew, L. ; Zavala, M. ; Parker, C. ; Cottard, H. ; Hildreth, J. ; Prabhu, L. ; Rai, R. ; Murphy, S. ; Montgomery, P. ; Kalpat, S. ; Ramon, M. ; Demkov, A. ; Taylor, B. ; Gilmer, D. ; Adams, V. ; Jiang, J. ; Chen, J. ; Chang, C.-H. ; Kaushik, V. ; Chandna, L. ; Sadd, M. ; Barr, A. ; Vandooren, A. ; Pham, D. ; Mendlcino, M. ; Cheek, J. ; Tseng, H. ; White, B. ; Tobin, P. ; Orlowski, M. ; Venkatesan, S. ; Mogab, J. (Invited Paper)
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.259-273,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
8.

Conference Proceedings
Conference Proceedings
8. X-RAY-0PTICAL MULTILAYER STRUCTURES STUDIES USING HIGH RESOLUTION ELECTRON MICROSCOPY
Stearns, Mary Beth ; Petford-Long, Amanda K. ; Chang, C.-H. ; Stearsn, D.G. ; Ceglio, N.M. ; Hawryluk, A.M.
Pub. info.: Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A..  pp.345-350,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 77
9.

Conference Proceedings
Conference Proceedings
9. Precision control of poly-gate CD by local OPC for elimination of microloading effect on 0.13-μm CMOS technology
Lee, T.-K. ; Wang, Y.-C. ; Chi, M. ; Lu, C.Y. ; Hsieh, C.H. ; Liu, R.G. ; Liao, H.J. ; Yang, S.S. ; Chang, C.-H.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.346-352,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
10.

Conference Proceedings
Conference Proceedings
10. Structure Investigations of Several In-Rich (Cu2Se)x(In2Se3)1-x Compositions: From Local Structure to Long Range Order
Chang, C.-H. ; Wei, Su-Huai ; Ahrenkiel, S.P. ; Johnson, J.W. ; Stanbery, B.J. ; Anderson, T.J. ; Zhang, S.B ; Al-Jassim, M.M. ; Bunker, G. ; Payzant, E.A. ; Duran, R.
Pub. info.: II-VI compound semiconductor photovoltaic materials : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 668
11.

Technical Paper
Technical Paper
11. Durability Assessments of Motorcycle Handlebars.
Lin, K.-Y. ; Chang, J.-M. ; Wu, J.-H. ; Chang, C.-H. ; Chang, S.-H.
Pub. info.: 2005 SAE world congress : technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005
12.

Conference Proceedings
Conference Proceedings
12. Alt- PSM of contact with phase-assist feature for 65-nm node
You, J.-W. ; Shin, J.-J. ; Chang, C.-H. ; Kung, L.-W. ; Chang, B.-C. ; Dai, C.-M. ; Gau, T.-S. ; Lin, B.J.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1263-1272,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
13.

Conference Proceedings
Conference Proceedings
13. Numerical study on thickness dependence of passivation layer in top-emission organic light-emitting devices
Shiau, C.-C. ; Chen, H.-C. ; Lee, J.-H. ; Kiang, Y.-W. ; Yang, C. C. ; Chang, C.-H.
Pub. info.: Projection Displays XI.  pp.149-157,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5740
14.

Conference Proceedings
Conference Proceedings
14. Precision control of poly-gate CD by local OPC for elimination of microloading effect on 0.13-μm CMOS technology
Lee, T.-K. ; Wang, Y.-C. ; Chi, M.-H. ; Lu, C.Y. ; Hsieh, C.H. ; Liu, R.G. ; Liao, H.J. ; Yang, S.S. ; Chang, C.-H.
Pub. info.: Optical Microlithography XVI.  Part One  pp.450-456,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
15.

Conference Proceedings
Conference Proceedings
15. Pecision control of poly-gate CD by local OPC for elimination of microloading effect on 0.13-Цm CMOS technology
Lee, T.-K. ; Wang, Y.-C. ; Chi, M.-H. ; Lu, C.Y. ; Hsieh, C.H. ; Liu, R.G. ; Liao, H.J. ; Yang, S.S. ; Chang, C.-H.
Pub. info.: Optical Microlithography XVI.  Part One  pp.450-456,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
16.

Conference Proceedings
Conference Proceedings
16. Defect dispositiong using mask printability analysis on alternating phase-shifting masks
Chang, C.-H. ; Hsieh, C.-H. ; Tzu, S.-D. ; Dai, C.-M. ; Lin, B. J. ; Pang, L. ; Qian, Q.-D. ; Chen, J.-H. ; Huang, J. H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.622-629,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
17.

Conference Proceedings
Conference Proceedings
17. Contact hole photo process improvement by multiple exposures with matched illumination settings
Yen, Y.-S. ; Huang, I-H. ; Hwang, J.-R. ; Hung, K.-C. ; Ku, C.-F. ; Chang, C.-H. ; Fang, C.-Y. ; Yen, P.W.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1530-1536,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
18.

Conference Proceedings
Conference Proceedings
18. Calibration of OPC models for multiple focus conditions
Schacht, J. ; Herold, K. ; Zimmermann, R. ; Torres, J.A. ; Maurer, W. ; Granik, Y. ; Chang, C.-H. ; Hung, G.K.-C. ; Lin, B.S.-M.
Pub. info.: Optical Microlithography XVII.  pp.691-702,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
19.

Conference Proceedings
Conference Proceedings
19. High-speed injection-locked lasers
Chrostowski, L. ; Chang, C.-H. ; Chang-Hasnain, C.J.
Pub. info.: Materials, Active Devices, and Optical Amplifiers.  pp.239-252,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5280
20.

Conference Proceedings
Conference Proceedings
20. High-speed injection-locked lasers
Chrostowski, L. ; Chang, C.-H. ; Chang-Hasnain, C.J.
Pub. info.: Vertical-Cavity Surface-Emitting Lasers VIII.  pp.60-72,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5364